il

1. he (third-person singular masculine subject pronoun for human subject)
2. it (third-person singular subject pronoun for grammatically masculine objects)
3. Impersonal subject; it

peu ou prou

more or less

du

• Contraction

  Contraction of de + le (“of the”)

• Article

même

• Adv

  even

• Adj

principe

1. principle
2. beginning; start; commencement
3. source; origin; cause

que

• Conj

  1. that (introduces a subordinate noun clause and connects it to its parent clause)
  2. Substitutes for another, previously stated conjunction.
  3. when, no sooner
  4. Links two noun phrases in apposition forming a clause without a (finite) verb, such that the complement acts as predicate.

• Pron
• Pron

la

• Article

  the (definite article)

• Pron
• Noun

photolithographie

photolithography